Microfabrication of FePt/W/FePt multilayer heterostructures via photolithography for spintronic applications

Abstract

This work reports on the design and microfabrication of magnetic multilayer heterostructures based on FePt thin films, targeting their integration in planar spin valve architectures. A key focus is placed on the development and optimization of a reliable fabrication strategy based entirely on multi-step photolithography, enabling precise pattern definition and alignment at the micrometer scale through the use of dedicated alignment markers.